Method for fabricating liquid crystal display device
US7358195B2 · kind B2 · utility
1Cited by
2References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 28, 2004 |
| Grant date | Apr 15, 2008 |
| Priority date | — |
| Expiry date | Jan 19, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23F1/26
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In etching a metal line formed as a dual layer of aluminum alloy and molybdenum, the metal line consisting of the dual layer of aluminum alloy and molybdenum is etched through one-time wet etching by applying the etchant including HNO3, HClO4, a Ferric compound (Fe3+), and a Flouro compound (F−), the process can be reduced and a metal line having a good profile can be formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.