Microfabricated miniature grids
US7358593B2 · kind B2 · utility
21Cited by
9References
24Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | May 6, 2005 |
| Grant date | Apr 15, 2008 |
| Priority date | — |
| Expiry date | May 6, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/977
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.