Apparatus and method for detecting a target environmental variable that employs film-bulk acoustic wave resonator oscillators
US7358651B2 · kind B2 · utility
6Cited by
11References
8Claims
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Key dates
| Filing date | Apr 18, 2005 |
| Grant date | Apr 15, 2008 |
| Priority date | — |
| Expiry date | Apr 3, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/0542
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for detecting a target environmental variable (TEV). A first film-bulk acoustic resonator (FBAR) oscillator that includes a first FBAR with a first response to the target environmental variable generates a first frequency. A second film-bulk acoustic resonator (FBAR) oscillator that includes a second FBAR with a second response to the target environmental variable generates a second frequency. A circuit that is coupled to the first FBAR oscillator and the second FBAR oscillator determines the target environmental variable (e.g., changes in the TEV) based on the first frequency and the second frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.