Electron beam recorder and electron beam irradiation position detecting method
US7359305B2 · kind B2 · utility
8Cited by
5References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2004 |
| Grant date | Apr 15, 2008 |
| Priority date | — |
| Expiry date | Sep 14, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B9/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron beam recorder includes an electron optical system for irradiating an electron beam on a master of an information recording medium and an electron beam irradiation position detecting unit for detecting an irradiation position of the electron beam in the electron optical system while the electron beam is being irradiated on the master by the electron optical system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.