Patent · US Expired

Differential method for layer-to-layer registration

US7359577B2 · kind B2 · utility

1Cited by
18References
6Claims
0Family size

Inventors

Key dates

Filing dateJul 13, 2004
Grant dateApr 15, 2008
Priority date—
Expiry dateMay 25, 2026

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F9/7076
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A system for precisely measuring layer-to-layer mis-registration is provided. The system includes a new type of mark and a comparison system, which compare the right and left signals from the mark to eliminate non-alignment noise, to enlarge the alignment information hundreds times then the actual shiftiness between two layers and to measure the mis-registration.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.