Non-contacting conveyance equipment
US7360322B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 16, 2001 |
| Grant date | Apr 22, 2008 |
| Priority date | — |
| Expiry date | Aug 16, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67784
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A non-contacting conveyance equipment comprises: a body having an end face that opposes an object to be conveyed, and a concave opening formed in the end face and surrounded by a cylindrical inner side wall; and a fluid passageway having a plurality of pairs of spouts to introduce fluid into an inner space of the concave opening in a circumferential direction of the cylindrical inner side wall so as to cause a swirl of fluid within the concave opening, each of the plurality of pairs of spouts being formed on the cylindrical inner side wall symmetrically to a central axis of the concave opening. A plurality of the non-contacting conveyance equipments may be provided on a base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.