Patent · US Active

Fluid sensor including an error detection device

US7360392B2 · kind B2 · utility

3Cited by
4References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 7, 2007
Grant dateApr 22, 2008
Priority date
Expiry dateMar 7, 2027

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N25/18
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A fluid sensor may be used for detecting fluid media, in particular hydrogen. The fluid sensor includes a sensor chip having a chip surface, which has a measuring surface and a body surface. Printed conductors of a central sensor circuit having at least one heating element and at least one temperature sensor are provided on the measuring surface. Furthermore, the fluid sensor has one additional fracture detection element and one fracture detection circuit situated on the sensor chip. The fracture detection circuit is designed for detecting fractures and/or cracks in and/or on the sensor chip, in particular in the area of a boundary between the measuring surface and body surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.