Method for determining tribological properties of a sample surface using a scanning microscope (sem) and associated scanning microscope

US7360404B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Michael Reinstadtler · Pocking, DE
• Ute Rabe · Saarburg, DE
• Walter Arnold · Saarburg, DE

Key dates

• Filing date: Aug 14, 2003
• Grant date: Apr 22, 2008
• Expiry date: Jan 25, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2291/101
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for examining a surface of a sample is described using an atomic force scanning microscope (AFM) comprising a cantilever with a longitudinal extension along which a measuring tip is disposed, which is selectively arranged relative to the sample surface by a means for driving and whose spatial position is detected using a sensor unit. Vibration excitation is conducted at excitation amplitudes which produce inside the cantilever torsional amplitudes with maximum values which form a largely (substantively) constant plateau value despite increasing excitation amplitudes and the resonance spectra, in a range of maximum values of the torsional amplitudes, a widening of the resonance spectrum which is determinable by a plateau width. The resonance spectra, preferably the plateau value, the plateau width and/or the gradient of the respective resonance spectra are used for examining the sample.