Magnetic field sensor
US7362098B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2005 |
| Grant date | Apr 22, 2008 |
| Priority date | — |
| Expiry date | Mar 30, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/028
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Two coil forming elements (12, 14) formed of conductor layers and a contact means (19), which is formed in an interlayer dielectric film (13) interposed between the conductor layers and brings the upper and lower coil forming elements into contact with each other through a via hole form a stacked coil (10). One end of the stacked coil is connected to an upper grounding layer (27) of a strip line (20), and the other end of the stacked coil is connected to a strip conductor (23) of the strip line. The number of turns of the stacked coil is larger than 1. A magnetic flux penetrating through the stacked coil increases to be able to induce a relatively large electromotive force. Thus, a high spatial resolution can be obtained easily.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.