Integrated microstructure sensor element for detecting thermodynamic variables of a fluid
US7362105B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 17, 2002 |
| Grant date | Apr 22, 2008 |
| Priority date | — |
| Expiry date | Jul 1, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated microstructure sensor element is proposed for detecting thermodynamic measured variables of a fluid. To that end, a supporting body, particularly a board or a wafer having at least one microstructured heating element in contact with the fluid during operation, is provided, on which or in whose vicinity are arranged first arrangement for at least intermittently acting on the heating element with an electric alternating current of defined frequency or a defined frequency band, as well a second arrangement for detecting the amplitude of the third harmonic wave of the electric voltage applied to the heating element. The proposed microstructure sensor element in the form of a compact, integrated component is suitable in particular for determining or monitoring the thermal conductivity and/or the thermal capacity of a fluid, particularly an oil in a motor vehicle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.