Patent · US Expired

Integrated microstructure sensor element for detecting thermodynamic variables of a fluid

US7362105B2 · kind B2 · utility

2Cited by
5References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 17, 2002
Grant dateApr 22, 2008
Priority date
Expiry dateJul 1, 2024

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N27/18
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An integrated microstructure sensor element is proposed for detecting thermodynamic measured variables of a fluid. To that end, a supporting body, particularly a board or a wafer having at least one microstructured heating element in contact with the fluid during operation, is provided, on which or in whose vicinity are arranged first arrangement for at least intermittently acting on the heating element with an electric alternating current of defined frequency or a defined frequency band, as well a second arrangement for detecting the amplitude of the third harmonic wave of the electric voltage applied to the heating element. The proposed microstructure sensor element in the form of a compact, integrated component is suitable in particular for determining or monitoring the thermal conductivity and/or the thermal capacity of a fluid, particularly an oil in a motor vehicle.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.