Patent · US Active

Micromirror devices and methods of making the same

US7362494B2 · kind B2 · utility

6Cited by
1References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 12, 2007
Grant dateApr 22, 2008
Priority date—
Expiry dateApr 12, 2027

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F39/806
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A method for making a micromirror device comprises is disclosed herein.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.