Piezoelectric actuator of an ink-jet printhead and method for forming the same
US7364275B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 22, 2004 |
| Grant date | Apr 29, 2008 |
| Priority date | — |
| Expiry date | Jan 11, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric actuator for providing a driving force to a pressure chamber of an ink-jet printhead for ejecting ink by deforming a vibration plate, the vibration plate forming an upper wall of the pressure chamber, the piezoelectric actuator including a lower electrode formed on the vibration plate, a piezoelectric film having either: (a) peripheral portions, the piezoelectric film formed on the lower electrode at a position that corresponds to the pressure chamber and having a space between the peripheral portions and the lower electrode, or (b) a lateral surface, the piezoelectric film formed on the lower electrode at a position that corresponds to the pressure chamber, the lateral surface of the piezoelectric film substantially forming a right angle with respect to a top surface of the lower electrode, and an upper electrode formed on the piezoelectric film for applying a voltage to the piezoelectric film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.