Method for producing micromechanical and micro-optic components consisting of glass-type materials

US7364930B2 · kind B2 · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Hans-Joachim Quenzer · Berlin, DE
• Peter Merz · Hanerau-Hademarschen, DE
• Arne Schulz · Hamburg, DE

Key dates

• Filing date: Jul 5, 2005
• Grant date: Apr 29, 2008
• Expiry date: Jun 7, 2026

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C03B2215/412
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

What is proposed here is a method of structuring surfaces of glass-type materials and variants of this method, comprising the following steps of operation: providing a semiconductor substrate, structuring, with the formation of recesses, of at least one surface of the semiconductor substrate, providing a substrate of glass-type material, joining the semiconductor substrate to the glass-type substrate, with a structured surface of the semiconductor substrate being joined to a surface of the glass-type surface in an at least partly overlapping relationship, and heating the substrates so bonded by annealing in a way so as to induce an inflow of the glass-type material into the recesses of the structured surface of the semiconductor substrate. The variants of the method are particularly well suitable for the manufacture of micro-optical lenses and micro-mechanical components such as micro-relays or micro-valves.