Dispersion of pyrogenically produced cerium oxide

US7365101B2 · kind B2 · utility

Assignee

• Degussa AG · DE

Inventors

• Michael Kröll · Nagold, DE
• Gunther Michael · Karlstein, DE
• Rainer Hahn · Tübingen, DE
• Stipan Katusic · Bad Soden, DE
• Stefan Heberer · Gelnhausen, DE
• Ralph Brandes · Princeton, US

Key dates

• Filing date: Sep 15, 2004
• Grant date: Apr 29, 2008
• Expiry date: Aug 19, 2025

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/2982
• WIPO field: Basic materials chemistry
• WIPO sector: Chemistry

Abstract

A dispersion of pyrogenically produced cerium oxide, which does not contain any particles larger than 1 μm, is produced by dispersing a pyrogenically produced cerium oxide in water by means of a dissolver, centrifuging it, separating the supernatant from the bottom product, and again dispersing the supernatant by means of ultrasound. The dispersion can be used for chemical-mechanical polishing (CMP).