Polymer-assisted deposition of films
US7365118B2 · kind B2 · utility
39Cited by
15References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2003 |
| Grant date | Apr 29, 2008 |
| Priority date | — |
| Expiry date | Jul 20, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02628
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.