Low-voltage flexible optic polymer modulators
US7366363B2 · kind B2 · utility
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25Claims
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Key dates
| Filing date | Apr 21, 2005 |
| Grant date | Apr 29, 2008 |
| Priority date | — |
| Expiry date | Oct 7, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electro-optic modulator is formed from all flexible materials, to form a flexible electro-optic modulator. The formation process uses a photoresist which selectively adheres to one material more than it adheres to another material. This allows selective liftoff, where only parts of the substrate are lifted off. For example, this allows silicon ends on the modulator, thereby facilitating pig tailing and also facilitates handling. Another aspect describes testing the bending radius.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.