Patent · US Active

Multilayer detector and method for sensing an electron beam

US7368739B2 · kind B2 · utility

4Cited by
5References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 26, 2005
Grant dateMay 6, 2008
Priority date
Expiry dateJul 25, 2026

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R19/0061
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A detector and method are disclosed for sensing an intensity of an electron beam. An exemplary detector includes a multilayer composite structure having a conductive core, an insulating layer formed on the conductive core, and an outer conductive layer electrically connected to a voltage potential and formed on the insulating layer. A support is configured to locate the conductive core in alignment with an electron beam generator, between an electron beam generator and a target area, and within a direct path of an electron beam to be generated by the electron beam generator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.