Multilayer detector and method for sensing an electron beam
US7368739B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2005 |
| Grant date | May 6, 2008 |
| Priority date | — |
| Expiry date | Jul 25, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R19/0061
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A detector and method are disclosed for sensing an intensity of an electron beam. An exemplary detector includes a multilayer composite structure having a conductive core, an insulating layer formed on the conductive core, and an outer conductive layer electrically connected to a voltage potential and formed on the insulating layer. A support is configured to locate the conductive core in alignment with an electron beam generator, between an electron beam generator and a target area, and within a direct path of an electron beam to be generated by the electron beam generator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.