Contactless flash memory array
US7368781B2 · kind B2 · utility
1Cited by
6References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 31, 2003 |
| Grant date | May 6, 2008 |
| Priority date | — |
| Expiry date | Dec 31, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B69/00
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for forming a contactless flash memory cell array is disclosed. According to an embodiment of the invention, a plurality of active regions is formed on a substrate. An insulating layer is then deposited over the active regions, and a portion of the insulating layer is removed to form a one-dimensional slot and to provide access to the active regions. A bit line is then formed in the slot in contact with the active regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.