Optical scanner and laser image projector using the same
US7369298B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 8, 2005 |
| Grant date | May 6, 2008 |
| Priority date | — |
| Expiry date | Sep 9, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N9/3129
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Provided are an optical scanner including a micro-mirror having an improved a driving angle by using a micro-electro-mechanical system (MEMS) technique and a laser image projector using the same are provided. The optical scanner includes: a substrate; a mirror unit suspended over the substrate and spaced apart from the substrate by a predetermined distance; a supporter situated on the substrate and supporting both ends of the mirror unit so that the mirror unit is suspended over the substrate; a supporting axis connected between both ends of the mirror unit and the supporter so that the mirror unit can be rotatably supported by the supporter; a plurality of movable comb electrodes vertically formed on both sides of the mirror unit; and a plurality of static comb electrodes vertically formed on the substrate in such a way that the static comb electrodes alternate with the movable comb electrodes, wherein the static comb electrode is a two-layer structured electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.