Closing module for an optical arrangement
US7369332B2 · kind B2 · utility
1Cited by
4References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 13, 2005 |
| Grant date | May 6, 2008 |
| Priority date | — |
| Expiry date | Apr 13, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0006
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Closing module for an optical arrangement, in particular for an objective for microlithography, comprising an optically active closing element (3) having a first axis (3.1) and a holding device (2) that fixes the closing element (3) at least in the direction of the first axis (3.1), the holding device (2) being configured for radial clamping of the closing element (3).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.