Patent · US Active

Parallel-beam scanning for surface patterning of materials

US7371596B2 · kind B2 · utility

10Cited by
8References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 30, 2004
Grant dateMay 13, 2008
Priority date
Expiry dateNov 21, 2026

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB23K2103/56
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

A system and method for parallel-beam scanning a surface. An energetic beam source emits an energetic collimated beam which is received by an optical device, comprising: one or more optical media, operable to receive the emitted beam, such as two pairs of coordinated mirrors or a right prism, and at least one actuator coupled to the one or more optical media, and operable to rotate each of the one or more optical media around a respective axis to perform a parallel displacement of the beam in a respective direction, wherein the respective direction, the beam, and the respective axis are mutually orthogonal. The optical device is operable to direct the beam to illuminate a sequence of specified regions of a surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.