Monolithic, spatially-separated, common path interferometer
US7372577B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2005 |
| Grant date | May 13, 2008 |
| Priority date | — |
| Expiry date | May 31, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Spatially-separated heterodyne interferometer architecture is combined with monolithic glass construction techniques to provide a monolithic, spatially-separated, common-path interferometer. The monolithic interferometer includes multiple optical components bonded together into a monolithic structure. The bonded components provide both optics and structure for the interferometer, thereby producing a small, compact, and light-weight interferometry system. Beam splitters and combiners are provided on the interfaces between the optical components to direct and combine signal measurement, signal reference and local oscillator beams used in the interferometry system. The spatially-separated architecture reduces cyclic error values below those of polarization-separated interferometers. In addition, the monolithic architecture of the interferometer minimizes the impact of mechanical, thermal, and optical variations within the system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.