Method of manufacturing a self-sustaining center-anchor microelectromechanical switch
US7373717B2 · kind B2 · utility
2Cited by
4References
9Claims
0Family size
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Key dates
| Filing date | Dec 11, 2006 |
| Grant date | May 20, 2008 |
| Priority date | — |
| Expiry date | Dec 11, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49208
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
Provided is a manufacturing method of self-sustaining center-anchor microelectromechanical switch driven by an electrostatic force used for controlling a signal transmission in an electronic system, which can suppress deformation of a movement plane generated during manufacturing and operation process by inserting the self-sustaining center-anchor, and improve a ground line contact phenomenon of an upper electrode, thereby enhancing reliability and signal isolation feature while maintaining an existing insertion loss feature compared to the microelectromechanical switch of the prior art.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.