Acoustic wave flow sensor for high-condensation applications
US7373838B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2005 |
| Grant date | May 20, 2008 |
| Priority date | — |
| Expiry date | Dec 12, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/6882
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acoustic wave flow sensor includes a piezoelectric substrate and a heater located immediately below the acoustic wave substrate. A heating element can be deposited in association with a plurality of acoustic wave components upon the acoustic wave substrate. The acoustic wave components, the piezoelectric substrate, the heater and the heating element operate in a high-condensation environment, such that the plurality of acoustic wave components are heated directly by the heater and/or the heating element, thereby promoting a desorption of water in the high-condensation environment in order to achieve accurate and reliable flow sensing data thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.