Stamper and transfer apparatus
US7374417B2 · kind B2 · utility
13Cited by
10References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2004 |
| Grant date | May 20, 2008 |
| Priority date | — |
| Expiry date | Sep 9, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S425/81
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A stamper and a transfer apparatus that utilizes the stamper, which is capable of accurately transferring its own pattern onto an article, such as a substrate, without being affected by any distribution of convex portions on the stamper surface or any contour of the substrate. The stamper has a fine concave-convex pattern on a surface thereof for forming a fine structure on a substrate using a pressing machine. The stamper is flexible and includes a buffer formed on an opposite side to the side on which the concave-convex pattern is formed. The buffer has a longitudinal distribution of moduli of elasticity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.