Fabrication and integration of polymeric bioMEMS

US7375404B2 · kind B2 · utility

Assignees

• University of Maryland Biotechnology Institute · US
• UNIVERSITY OF MARYLAND, COLLEGE PARK · US

Inventors

• Jung-jin PARK · Seongnam-si, KR
• Reza Ghodssi · Silver Spring, US
• Gary W. Rubloff · Clarksville, US
• Mark Kastantin · Goleta, US
• Sheng Li · Greenbelt, US
• Li-Qun Wu · North Potomac, US
• Hyunmin Yi · Ellicott City, US
• Theresa Michelle Valentine · Potomac, US

Key dates

• Filing date: Dec 3, 2004
• Grant date: May 20, 2008
• Expiry date: Jul 29, 2025

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/058
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micro-electro-mechanical system (MEMS) device is provided, along with means for its fabrication and operation for microfluidic and/or biomicrofluidic applications. The MEMS device includes a substrate, optional electrodes on the substrate, a patterned structure on the substrate, the patterned structure having a fluidic microchannel aligned with one or more of the optional electrodes, an encapsulation membrane covering the microchannel, and an optional reactive layer deposited over the electrode in the microchannel. MEMS devices of preferred embodiments permit a leak-tight seal to be formed around the microchannel and fluidic interconnects established for robust operation of fluidics-based processes. MEMS devices of other preferred embodiments permit reversible attachment and separation of the encapsulation membrane relative to the patterned structure.