Method of repairing micromirrors in spatial light modulators
US7375873B2 · kind B2 · utility
3Cited by
22References
20Claims
0Family size
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Key dates
| Filing date | Feb 28, 2005 |
| Grant date | May 20, 2008 |
| Priority date | — |
| Expiry date | Apr 20, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.