Method for producing ink-jet recording head having filter, ink-jet recording head, substrate for recording head, and ink-jet cartridge
US7377625B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2005 |
| Grant date | May 27, 2008 |
| Priority date | — |
| Expiry date | Apr 21, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49083
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
In a method for producing an ink-jet recording head, a plurality of through-holes is formed in a heat storage layer formed on one surface of a silicon substrate, subsequently, heating elements are formed, and a protective layer is formed on the substrate. A passage-forming member forming discharge ports and ink passages is formed on the protective layer and an ink supply port is then formed by anisotropic etching from the other surface of the silicon substrate. In this step, since the protective layer serves as an etching stop layer, the passage-forming member is not in contact with an etchant. Subsequently, the protective layer formed in the through-holes is removed so that the ink supply port includes a filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.