IDT electroded piezoelectric diaphragms
US7378782B2 · kind B2 · utility
3Cited by
9References
24Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Nov 26, 2004 |
| Grant date | May 27, 2008 |
| Priority date | — |
| Expiry date | Jul 10, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/045
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The disclosed invention relates to achieving micromachined piezoelectrically-actuated diaphragms. The piezoelectric diaphragm includes a central, inactive electrode free region and an annular shaped interdigitated electrode adjacent to the outer periphery of the central region. The diaphragm also may have an inactive annular, electrode free region and an active central, interdigitated electrode region. The diaphragms may be used in, such as, miniature pumps. The pumps may include a plurality of chambers to generate peristaltic pumping of fluids.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.