Hybrid high-bandwidth deformable fast steering mirror
US7380950B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 15, 2005 |
| Grant date | Jun 3, 2008 |
| Priority date | — |
| Expiry date | Jul 24, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0825
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A high-bandwidth deformable fast steering mirror (“HDFSM”) system, including an electromechanical fast steering mirror (“FSM”) apparatus, and a deformable mirror (“DM”) apparatus mounted on the electromechanical FSM apparatus. The DM apparatus further includes a DM substrate, a backplane assembly, a plurality of electrostrictive actuators in physical communication with and between the DM substrate and the backplane assembly, for deforming the DM substrate, and a plurality of strain gauges, each strain gauge mounted on one of the plurality of electrostrictive actuators, the plurality of strain gauges measuring individual positions of the plurality of electrostrictive actuators and transmitting the positions as actuator position signals. The high-bandwidth deformable FSM also includes a closed-loop control system, the control system controlling the electromechanical FSM apparatus and the DM apparatus based upon a command input and the actuator position signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.