Method of fabricating a surface shape recognition sensor
US7381663B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 7, 2007 |
| Grant date | Jun 3, 2008 |
| Priority date | — |
| Expiry date | Feb 7, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/942
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A structure (113b) which includes an overhang and a support portion supporting substantially the center of the overhang, and in which the area of the support portion is smaller than the area of the overhang in the two-dimensional direction of an upper electrode (1110b) is formed on the upper electrode (110a) in a region above each lower electrode 105a in one-to-one correspondence with the lower electrode (105a). An object of surface shape sensing, e.g., the tip of a finger (1602) touches the surface of the overhang of the structure (113b), and the support portion of the structure (113b) whose overhang is in contact with the object of sensing pushes down a portion of the upper electrode (110a) toward the lower electrode (105a), thereby deforming the upper electrode (110a).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.