Non-axisymmetric charged-particle beam system
US7381967B2 · kind B2 · utility
2Cited by
2References
32Claims
0Family size
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Key dates
| Filing date | Jun 6, 2005 |
| Grant date | Jun 3, 2008 |
| Priority date | — |
| Expiry date | May 13, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J29/64
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.