Interferometric measuring device
US7382467B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 3, 2004 |
| Grant date | Jun 3, 2008 |
| Priority date | — |
| Expiry date | Aug 14, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometric measuring device for measuring the shape or profile of a surface of an object by depth scanning includes a radiation source emitting a short coherent beam, a beam splitter for forming an object beam guided by panorama optics to the object via an object light path and a reference beam guided to a reflecting reference element via a reference light path, and an image pick-up which receives the radiation reflected by the object and the reference element and brought into interference and transmits it to an evaluator for determining the surface shape. An accurate and rapid measurement of surfaces, e.g., in narrow cavities, may be accomplished relatively easily in that a reference surface oriented at an angle to the object surface is formed by the reference element, and the measuring device is configured so that the depth scanning for measuring shape is accomplished by laterally moving the object in relation to the object beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.