System and method for correcting systematic error of, and calibrating for, tilt angle of surface topology sensor head having plurality of distance sensors

US7385214B2 · kind B2 · utility

Assignee

• BUNDESREPUBLIK DEUTSCHLAND, VERTRETEN DURCH DAS BUNDESMINISTERIUM FUR WIRTSCHAFT UND ENERGIE, DIESES VERTRETEN DURCH DEN PRASIDENTEN DER PHYSIKALISCH-TECHNISCHEN BUNDESANSTALT · DE

Inventors

• Ingolf Weingaertner · Braunschweig, DE
• Clemens Elster · Berlin, DE
• Michael Schulz · Bexbach, DE

Key dates

• Filing date: Jul 4, 2005
• Grant date: Jun 10, 2008
• Expiry date: Jul 4, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B11/24
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a measuring arrangement comprising a sensor head (13) that can be displaced over a surface (11) at a distance therefrom in a scanning direction (R), a plurality of distance sensors which are suitable for distance measurement and are interspaced in the scanning direction in a fixed manner, a displacement device for displacing the sensor head (13) in such a way that points of the surface (11) are detected in successive scanning steps carried out by a plurality of distance sensors, and an evaluation device to which the output signals of the distance sensors are supplied. According to the invention, one such measuring arrangement is improved by an angle measuring device (14, 15) for determining an angle value of the sensor head (13) in relation to the scanning direction (R), and for forwarding said angle value to the evaluation device. In this way, systematic measuring errors can be eliminated for the reconstruction of a topography of the surface (11) in the scanning direction (R). Furthermore, the sensor head (13) can be calibrated by means of the measuring arrangement.