Driving apparatus, exposure apparatus, and device manufacturing method
US7385370B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 23, 2007 |
| Grant date | Jun 10, 2008 |
| Priority date | — |
| Expiry date | Mar 23, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/49257
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A driving apparatus for moving an object. The apparatus includes a first actuator which drives the object in X and Y directions, a second actuator which drives a reaction force counter which receives a reaction force generated when the first actuator drives the object, and a controller which calculates X- and Y-direction reaction forces and a moment reaction force on the basis of X- and Y-direction positions of the object and X- and Y-direction accelerations of the object, which are to be received by the reaction force counter when the object is driven by the first actuator, and controls the second actuator so as to cancel the reaction forces and the moment reaction force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.