Method of determining the pressure of a gas mixture in a vacuum container by means of absorption spectroscopy
US7385703B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 12, 2006 |
| Grant date | Jun 10, 2008 |
| Priority date | — |
| Expiry date | Dec 12, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L11/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The method of determining, by absorption spectroscopy, the pressure of a gas mixture in a vacuum container located in an environment containing the gas to be measured, and the pressure of the gas is different from that in the vacuum container. A device comprising a laser and a laser detector measures an absorption curve AR(λ) of the gas in the beam path between the laser and the detector. The vacuum container is placed into the beam path and the absorption curve AM(λ) of the gas is determined in the beam path into which the vacuum container has been placed and the absorption curve AR(λ) is made to coincide by compression with the absorption curve AM(λA) outside of the absorption curve of the gas, the extent of compression being determined by a proportionality factor c, the following relation for determining the gas to be measured in the vacuum container being: AG(λ)=AM(λ)− c·AR(λ).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.