Mems mirror array and controls
US7386201B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2007 |
| Grant date | Jun 10, 2008 |
| Priority date | — |
| Expiry date | Mar 26, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A MEMS mirror array in which the MEMS mirrors are driven in two axes by vertical comb drive actuators. Tortional elements with conductive comb fingers are utilized to provide the two axis actuation. A MEMS mirror control system supplies electrical voltage potentials between inside pivoting support frame conductive comb fingers and mirror frame conductive comb fingers and supplies electrical voltage potentials between MEMS mirror array support frame conductive comb fingers and outside pivoting support frame conductive comb fingers. In preferred embodiments two MEMS mirror arrays are utilized to provide beam direction in a cross connect switch.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.