Method for manufacturing ceramic green sheet and method for manufacturing electronic part using that ceramic green sheet
US7387870B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 2004 |
| Grant date | Jun 17, 2008 |
| Priority date | — |
| Expiry date | Mar 6, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2203/0514
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The invention relates to a so-called ceramic green sheet used for manufacturing multilayer ceramic electronic parts. The invention is intended to improve accuracy in shape of an electrode or other element formed on the sheet, accuracy in its position and uniformity in its thickness. In a process according to the invention, a layer made of a photosensitive material including a powder having a desired electric characteristic is formed on a light transmissive base member. A mask having a desired pattern is disposed on the back side of the base member and the photosensitive material is exposed from the back side of the base member through the mask. Then the photosensitive layer after the exposure is subjected to development.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.