Alumina-sintered body and associated manufacturing method, and electrostatic chuck and associated manufacturing method
US7387977B2 · kind B2 · utility
3Cited by
8References
9Claims
0Family size
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Key dates
| Filing date | Mar 8, 2006 |
| Grant date | Jun 17, 2008 |
| Priority date | — |
| Expiry date | Aug 12, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A binder is mixed to alumina powder with a purity of 99.5% or more (step S11), the mixture is granulated (step S12), resultant granule powder is formed with a die (step S13), and a formed compact is sintered in a hot-pressing manner (step S14).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.