Acoustic resonator performance enhancement using alternating frame structure
US7388454B2 · kind B2 · utility
155Cited by
167References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2005 |
| Grant date | Jun 17, 2008 |
| Priority date | — |
| Expiry date | Jan 14, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0428
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The alternating frame region is on one of the first and second electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.