Method of generating interferometric information
US7388669B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 15, 2005 |
| Grant date | Jun 17, 2008 |
| Priority date | — |
| Expiry date | Aug 30, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/453
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides methods for generating interferometric information. Interferometric information from refractively scanned interferometers can contain errors due to wavelength-dependent refractive indices. The wavelength-dependent refractive indices of elements of the interferometer can produce errors when the OPD at a reference wavelength is different than the OPD at a sample wavelength. The invention can provide correction of interferometric information using relationships between the OPD at the wavelengths of interest, which correction can also be dependent on physical relationships among elements of the interferometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.