Z-axis thermal accelerometer
US7392703B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 10, 2005 |
| Grant date | Jul 1, 2008 |
| Priority date | — |
| Expiry date | Jun 22, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/008
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermal accelerometer device that allows up to three axes of acceleration sensing. The thermal accelerometer includes a substantially planar substrate, a cavity formed in the substrate, a heater element, and at least first and second temperature sensing elements. The heater element is suspended over the cavity, and the first and second temperature sensing elements are disposed along the X or Y axis in the substrate plane on opposite sides of and at equal distances from the heater element. The thermal accelerometer employs differential temperatures detected by the temperature sensing elements to provide indications of acceleration in the X or Y directions. Further, the thermal accelerometer employs a common mode temperature detected by the temperature sensing elements to provide an indication of acceleration along a Z axis perpendicular to the X and Y axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.