Pressure sensor device
US7392706B2 · kind B2 · utility
8Cited by
6References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 2004 |
| Grant date | Jul 1, 2008 |
| Priority date | — |
| Expiry date | Nov 26, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor substrate 1 having on its lower surface a surface acoustic wave element 2 for detecting pressure is mounted on a supporting substrate 6 through a sealing member 4 surrounding a sensor section 2. A sealing space S is formed by the sensor substrate 1, the supporting substrate 6, and the sealing member 4, and the surface acoustic wave element 2 for detecting pressure is sealed hermetically in the sealing space S. Reliability can be enhanced by protecting the surface acoustic wave element 2 from the external environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.