Coating apparatus and organic electronic device fabricating method
US7393413B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 5, 2004 |
| Grant date | Jul 1, 2008 |
| Priority date | — |
| Expiry date | Mar 8, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
Abstract
A coating apparatus 10 includes a base 11, a substrate support stage unit 2 mounted on the base 11 and capable of fixedly supporting a substrate 1, a coating unit 3 mounted on the base 11 and capable of discharging a coating material onto a substrate 1 fixedly supported on the substrate support stage unit 2, and a motor unit 4 for driving at least either the substrate support stage unit 2 or the coating unit 3 for sliding on the base 11. The motor unit 3 has a stator assembly 22 on the base 11. The stator assembly 22 includes a plurality of magnets 31 linearly arranged such that opposite magnetic polarities of the magnets alternately change, and a pair of magnet holding members 37 and 38 for linearly pressing the magnets 31 together from both the ends of the magnets.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.