Micromirror array device with electrostatically deflectable mirror plates
US7394140B2 · kind B2 · utility
4Cited by
17References
61Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 19, 2005 |
| Grant date | Jul 1, 2008 |
| Priority date | — |
| Expiry date | Apr 19, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2300/0465
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Disclosed herein is a micromirror array device that comprises an array of reflective deflectable mirror plates each being associated with one single addressing electrode to be deflected to an ON state angle. A light transmissive electrode is disposed proximate to the mirror plates for deflecting the mirror plates to a non-zero OFF angle. The mirror plates are arranged in the array with a center-to-centre distance of 10.17 microns or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.