Method and apparatus for full phase interferometry
US7394546B2 · kind B2 · utility
5Cited by
11References
26Claims
0Family size
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Key dates
| Filing date | May 22, 2006 |
| Grant date | Jul 1, 2008 |
| Priority date | — |
| Expiry date | Aug 31, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/45
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for differential spectral interferometry comprising providing an interferometer comprising a light source; employing an element to provide a dithered relative phase shift between target and reference arms of the interferometer, detecting output from the interferometer, demodulating signals received from the detector at different multiples of the dither frequencies, generating more than one real-valued interferograms from demodulated signals, and using the real-valued interferograms to obtain the complex spectral interferogram.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.