Method for quantitatively and/or qualitatively detecting layer thicknesses, a microreaction vessel and titre plate

US7396684B2 · kind B2 · utility

Assignee

• Institut für Mikrotechnik Mainz GmbH · DE

Inventors

• Wolfgang Ehrfeld · Karlsruhe, DE
• Peter Westphal · Jena, DE
• Bernd Limburg · Sörgenloch, DE
• Antje Pommereau · Kaiserslautern, DE
• Svend Berger · Mainz, DE

Key dates

• Filing date: Feb 9, 2001
• Grant date: Jul 8, 2008
• Expiry date: Sep 6, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B11/065
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a method for quantitatively and/or qualitatively detecting layer thicknesses of biological or chemical molecules by means of ellipsometric measurements. Said molecules are deposited on at least one metal layer by virtue of interactions with a gaseous or liquid medium, whereby said metal layer is provided with an immobilisation layer. A method that can be carried out quickly is provided by including the surface plasmon resonance. Said method is provided with a significantly greater detection sensitivity and can be used not only for qualitatively detecting layers. According to the inventive method, the angle of incidence and/or the frequency of the electromagnetic radiation which is used for the ellipsometric measurements is/are adjusted in such a way that a surface plasmon resonance is produced in the metal layer. The detection sensitivity (δ cos Δ)/(thickness of the layer to be detected) is adjusted by means of the thickness of the metal layer.