Synchronization technique for forming a substantially stable laser output pulse profile having different wavelength peaks
US7396706B2 · kind B2 · utility
10Cited by
42References
20Claims
0Family size
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Key dates
| Filing date | Feb 25, 2005 |
| Grant date | Jul 8, 2008 |
| Priority date | — |
| Expiry date | Feb 15, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/94
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A specially shaped laser pulse energy profile characterized by different laser wavelengths at different times of the profile provides reduced, controlled jitter to enable semiconductor device micromachining that achieves high quality processing and a smaller possible spot size.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.