Ultrasonic wave generating device
US7397167B2 · kind B2 · utility
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18Claims
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Assignee
Inventors
Key dates
| Filing date | Nov 21, 2006 |
| Grant date | Jul 8, 2008 |
| Priority date | — |
| Expiry date | Nov 21, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S7/521
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An ultrasonic wave generating device includes a substrate, a heat insulation layer on the substrate, a membrane heating portion on the heat insulation layer, and a membrane oscillator on the heating portion. The heating portion is electrically driven with a predetermined period, and produces heat for thermally displacing a surface of the oscillator. The oscillator receives a temperature variation with the predetermined period from the heating portion, and oscillates so as to generate ultrasonic waves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.