Method for verifying scan precision of a laser measurement machine
US7397551B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 24, 2006 |
| Grant date | Jul 8, 2008 |
| Priority date | — |
| Expiry date | Feb 21, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for verifying scan precision of a laser measurement machine includes the steps of: preparing a standardized BGA model; measuring Z coordinates values of each solder ball peak of the BGA model for certain times; determining a Z coordinates conventional true value of each solder ball peak; measuring X, Y coordinates values of each solder ball centre of the BGA model; determining a coplanarity conventional true value of a seating-plane; determining an optimum scanning mode; determining optimum scanning parameters under the optimum scanning mode; scanning the BGA model under the optimum scanning parameters and the optimum scanning mode; obtaining X, Y, Z coordinates values of each solder ball peak; evaluating the veracity of Z coordinates of each solder ball peak; evaluating the veracity and repetitiveness of coplanarity; and evaluating scan precision of the laser measurement machine.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.